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Ulvac - SMALL VACUUM PUMPS & SYSTEMS - ENG

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Diaphragm Type

High Vacuum Type

Anti-corrosive Type

Rocking Piston Type

Scroll Type

Multi-Stage Roots Type

Standard Type

Mechanical Booster Pump

Anti-corrosive Type

Turbo Molecular Pumping System

Mechanical Booster Pumping System

High Vacuum Pumping Systems

High Vacuum Pumping Systems “DEPOX”

Vacuum Coaters

Vacuum Coaters “DEPOX”

Vacuum Coater

Sputtering Systems

Optional Parts

 

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